OXIDE MATERIALS SINGLE CRYSTAL GROWTH SYSTEM
TCH-20
Characteristics
Precisely controls temperature and driving.
Improves working efficiency thanks to front-open-door type cooling water jacket chamber.
Designed with the concept of achieving lighter weight of the equipment and of improving performance.
Specification
| model | TCH-20 | |
| – | CZ | EFG |
| Heating temperature | 2100°C | |
| Crucible size | ø150mm*150mmH | |
| Pulling rod stroke | 700mm(Max.) | 900mm(Max.) |
| Pulling rod elevation speed | 0.2-10mm/h | |
| Pulling rod rotation speed | 60rpm | none |
| Pulling rod rotation angle | None | ±15° |
| Pulling rod X-Y drive stroke | None | ±15° |
| R.F coil stroke | 100mm | |
| load cell span | 20N , 50N , 100N | |
| R.F generator output | 50Kw | |